Westpac Associates

Equipment and Solutions for Semiconductor and Display Manufacturing

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Westpac offers innovative products and solutions for semiconductor, display, MEMS and nanotechnology R&D and manufacturng. We focus on lithography, thin films and metrology products.











   - Nano Imprint Lithography

   - EUV Light Source

   - Simulation Software for Advanced Lithography
 
   - Wireless monitoring of etch chamber, ion implant and CMP

   - 4-point probe

   - Micro probing for Ultra Shallow Junction

   - Surface flatness measurement

   - Photoresisit analysis

   - Film thickness measurement
 
NEWS

- Cadence Strengthens DFM Core Technology and Solutions Through Acquisition of Invarium

- (Jan 8 2008) Nanoimprint Litho Ramps for HDDs, CMOS

- (Nov 6, 2007) TEGAL RECEIVES REPEAT ORDER FOR 6500 SERIES ADVANCED PLASMA ETCH SYSTEM FROM SKYWORKS SOLUTIONS, INC.

- (Oct 16 2007) Toshiba Validates Imprint Lithography for 22nm Node CMOS Device Fabrication


- Westpac and Tegal Corporation signs sales and service exclusive representative agreement










New Product
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Resolution:  Sub-50 nm, half-pitch
Alignment:  Optional <250nm (single point X, Y) configuration available
Flexibility:   Can be configured to accept 25mm to 150mm substrates
Automation: Automated wafer and template loading
 
   - PVD/ Sputtering

   - Plasma Etch

   - NLD (Nano Layer Deposition)
 
   - Digital Autocollimator

   - Motor, Galvonometer and Resonant Scanner

   - Linear Motor Stages

   - Servo Amplifier

   - Sensors

   - DAQ (Data Acquisition)
 
 
Westpac Partners
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