| Nano Imprint Lithography for CMOS, LED, Pattern Media, etc.
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| Simulaion software, EM-Suite, for advanced lithography
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- PVD
- Plasma Etch
- Nano Layer Deposition (NLD)
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| Surface flatness measurement system for wafer, photomask and LCD glass
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| Micro probing for magneto-resistence and USJ (Ultra Shallow Junction) resistence
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| 4-point probe resistivity mapping system
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