Westpac Associates

Corning Tropel Corporation designed the UltraFlat 200 Mask System specifically for the photomask industry. It delivers the lowest measurement uncertainty for ever-tightening mask flatness specifications. Shrinking device features require not only flatter wafers, but flatter masks.

The UltraFlat system is used to measure flatness of photoblanks and photomasks throughout every stage of manufacturing and use, including, substrate polishing, coating and patterning to analyze film stress, and verification.

UltraFlat system utilizes near-normal incidence interferometry, rock solid structural design, state-of-the-art optical fabrication techniques and Tropel's renowned phase shifting analysis software to deliver 20 nanometer measurement uncertainty.

The system is NIST traceable and provides measurements that conform to SEMI standards. An automated photomask handling and measurement configuration is also available.

Additional Information
Ultraflat Product Information Sheet

The continued demand for higher density chips with smaller critical dimensions leads to tighter substrate form tolerances both on the global scale and on the individual die-site scale.

At Corning Tropel, we have optimized our patented grazing-incidence interferometry technology for the highest precision wafer flatness measurements.

The FlatMaster Wafer Analysis System is ideal for processes development, particularly for new, non-silicon materials.

From wire saw to finished wafer, you can quickly and accurately measure wafer flatness to verify that you or your customers have the ability to achieve the required device yields.

The FlatMaster Wafer system measures flatness, taper, thickness variation, thickness, stress, bow, warp, SORI, and many other parameters including stepper simulation of any wafer surface.

Industry standard chucks are easy to load and are non-damaging to wafers.

Combined with our state of the art optical fabrication techniques and Tropel's renowned phase-shifting analysis software, the FlatMaster Wafer offers full form surface information with 50 nanometer accuracy in seconds.

Additional Information
Flatmaster Wafer Product Information Sheet 

As part of its successful line of optical, non-contact metrology instruments, Corning Tropel is proud to introduce the Tropel FlatMaster 1400.

Corning Tropel is one of the industry leaders in providing flatness measurement technology and has now expanded its capabilities to include measuring large LCD image masks.

The FlatMaster 1400, which utilizes Corning Tropel’s grazing incidence interferometry technology, provides flatness measurements of LCD image masks with superior repeatability and accuracy to meet next generation flatness requirements.

Key Benefits

• Industry leading measurement repeatability & accuracy
• Measures flatness of a wide range of surface finishes
• Designed to meet current and emerging measurement specifications
• Customizable to fit individual customer requirements

Additional Information
Flatmaster 1400 Product Information Sheet