Features & Benefits
* Unique electrodeless design - Low debris / low consumable cost
* Up to 10W into 2pi using Xenon - Sufficient power for a wide variety of applications
* 2-4nm Soft X-Rays produced using Nitrogen - Enables tabletop SXR microscope applications
* Up to 1kHz repetition rate - Continuous or burst mode
* Small plasma size - Below 1mm diameter
* Flexible optical interface - To suit customer application
* Cost-effective and compact - Low cost per EUV & SXR watt - Small footprint
Applications
* EUV Metrology
* EUV Resist Development
* Defect Inspection
* EUV & Soft X-Ray Microscopy
Product Description
Researchers into the emerging technology of EUV lithography need a source of EUV photons for a variety of applications. Existing sources of light are often too low in power, unreliable in operation, large, costly and complex. Soft X-rays (SXR) for water-window microscopy are not readily available today outside synchrotron facilities.
The EQ-10M is a compact, easy-to-use, reliable and cost-effective EUV & SXR light source system, based on Energetiq's unique Electrodeless Z-pinch (tm) technology using either Xenon or Nitrogen gas.
The Energetiq EQ-10M is integrated into a single 19" rack format to minimize the system footprint. The system includes the electrodeless Z-pinch source assembly, vacuum and gas sub-systems, power delivery subsystem and control electronics. The EQ-10M is capable of delivering up to 10 watts of in-band (+/- 1% BW) EUV into 2pi steradians and will run continuously at pulse repetition rates of up to 1kHz or in bursts of up to 1kHz pulses if required.
To accommodate the differing requirements of the various applications, the source operating conditions are user-adjustable. The EUV light output can be optimized for peak power or for peak brightness as required by the user. Plasma size is typically below 1mm in diameter under typical operating conditions. A simple and flexible optical interface is provided to the user on the side of the system enclosure to connect to the application equipment. Custom interfaces are available to meet specific customer requirements. The user interface operates by a color touch screen display, and incorporates menus allowing manual and automatic operation.
The EQ-10M is easy to install, requiring only electrical power, a chilled water supply, clean dry compressed air and a supply of Xenon or Nitrogen. Footprint of the system is 600mm (W) x 900mm (D). The complete system rack height is 1900mm.
